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Design and optimization of a Vibrational MEMS-Based Energy Harvester

  • ISEP-Institut Supérieur d'Electronique de Paris
  • Université Paris-Saclay
  • University of California at Berkeley

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This paper describes the design of a Vibrational Energy Harvester (VEH) based on a microelectromechanical system (MEMS) with gap-closing electrostatic resonator. The electrical signal generated by the MEMS is rectified with a charge pump circuit based on the Greinacher Voltage Doubler (GVD). The performance of the VEH system is analyzed and an optimal resistive load is calculated to maximize harvested power and frequency range of operation. The rectifier was designed in a 0. 18µm technology. The VEH system was validated with Cadence Virtuoso. The designed energy harvester generates a DC output power of 90. 06nW at 9. 95V under an applied vibration with an acceleration amplitude of 0.33 m s wedge2 at a frequency of 53Hz.

Original languageEnglish
Title of host publicationPRIME 2022 - 17th International Conference on Ph.D Research in Microelectronics and Electronics, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages209-212
Number of pages4
ISBN (Electronic)9781665467001
DOIs
StatePublished - 2022
Event17th International Conference on Ph.D Research in Microelectronics and Electronics, PRIME 2022 - Villasimius, Italy
Duration: 12 Jun 202215 Jun 2022

Publication series

NamePRIME 2022 - 17th International Conference on Ph.D Research in Microelectronics and Electronics, Proceedings

Conference

Conference17th International Conference on Ph.D Research in Microelectronics and Electronics, PRIME 2022
Country/TerritoryItaly
CityVillasimius
Period12/06/2215/06/22

Keywords

  • Acceleration
  • MEMS
  • VEH

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