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Effects of the compliance current in the electroforming process of HfO2-based ReRAM devices

  • Silvana Guitarra*
  • , Lionel Trojman
  • , Laurent Raymond
  • *Corresponding author for this work
  • ISEP
  • Aix-Marseille Université

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

Abstract

Electroforming is the activation process of ReRAM devices that initiates the resistive switching response by creating filamentary conduction paths in the oxide film. This step is fundamental for the proper operation of the device, and it is controlled by a compliance current (Ic) that prevents the hard dielectric breakdown of the ReRAMs. In this work, we study the influence of this current during the electroforming process and operation in HfO2-based ReRAM devices of different areas. Some parameters from the IV curve were extracted and analyzed to understand how the process could affect the device's performance. We found a maximum value of Ic needed to form the CF independent of the area device that does not provoke significant changes in the electrical behavior.

Original languageEnglish
Title of host publication2023 IEEE Latin American Electron Devices Conference, LAEDC 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350311907
DOIs
StatePublished - 3 Jul 2023
Event2023 IEEE Latin American Electron Devices Conference, LAEDC 2023 - Puebla, Mexico
Duration: 3 Jul 20235 Jul 2023

Publication series

Name2023 IEEE Latin American Electron Devices Conference (LAEDC)

Conference

Conference2023 IEEE Latin American Electron Devices Conference, LAEDC 2023
Country/TerritoryMexico
CityPuebla
Period3/07/235/07/23

Keywords

  • ReRAM
  • compliance current
  • conductive filament
  • electroforming
  • filamentary conduction

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