Remote control of VNA and parameter analyzer for RFCV measurements using Python

Esteban Garzon, Fernando Sanchez, Luis Miguel Procel, Lionel Trojman

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


This paper presents the development of capacitance measurement with RF signal (RFCV) for MOSFET. Such technic is fundamental to measure and extract capacitances from nanometric range oxide thickness, which are very leaky in low frequency range measurements. This method uses the control and synchronization of a vector network analyzer (VNA) with a Source Measure Unit (SMU) from a parameter analyzer (PA). The control is established by a remote graphical interface developed in Python. It includes the use of standards like IEEE 488.2, SCPI and Ethernet link protocol. For the RFCV measurements, the SMU provides the DC voltage whereas the VNA the RF signal.

Original languageEnglish
Title of host publicationProceedings of the 2016 IEEE ANDESCON, ANDESCON 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509025312
StatePublished - 27 Jan 2017
Event2016 IEEE ANDESCON, ANDESCON 2016 - Arequipa, Peru
Duration: 19 Oct 201621 Oct 2016

Publication series

NameProceedings of the 2016 IEEE ANDESCON, ANDESCON 2016


Conference2016 IEEE ANDESCON, ANDESCON 2016


  • IEEE 488.2
  • Network Analyzer
  • Python
  • RFCV
  • SCPI
  • SMU
  • VNA


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