This paper presents the development of capacitance measurement with RF signal (RFCV) for MOSFET. Such technic is fundamental to measure and extract capacitances from nanometric range oxide thickness, which are very leaky in low frequency range measurements. This method uses the control and synchronization of a vector network analyzer (VNA) with a Source Measure Unit (SMU) from a parameter analyzer (PA). The control is established by a remote graphical interface developed in Python. It includes the use of standards like IEEE 488.2, SCPI and Ethernet link protocol. For the RFCV measurements, the SMU provides the DC voltage whereas the VNA the RF signal.